PULSAR 3000

VLSI Interview with Peo Hansson,
General Manager ASM America

• Click to listen to audio interview

Technical Articles

• Below 22nm, spacers get unconventional: Interview with ASM (January 13, 2011)
• Wilk, ASM, on materials modification to extend scaling 1-2 gens past 22nm (January 10, 2011)
• Atomic layer deposition goes mainstream in 22nm logic technologies (November 2010)
• “Atomic Layer Deposition: Enabling Advanced High-k and Metal Films,” Semiconductor Manufacturing China
• “Solid Source Delivery System Enables Hafnium-Based Gate Dielectrics,” Semiconductor International, April 2008
  
• "ALD comes to single-metal high-k gate stacks," Solid State Technology, July 2008

Conference Presentations

• Production-Ready ALD Toolset for CMOS, Dr. Eric Shero

Press Releases

• February 24, 2010 ASM International Extends Market Leadership for High-k ALD, Books two New Pulsar Orders for both R&D and Manufacturing Ramp
• December 9, 2009 ASM International N.V. and Air Liquide Sign Agreement on Advanced High-K ALD Precursors
• December 7, 2009 ASM International N.V. Features Innovative Atomic Layer Deposition Processes at Luncheon Seminar
• October 29, 2009 ASM International N.V. Expands Leadership in High-k ALD, Leading Logic Manufacturer Decides to Buy Pulsar Tool
• July 29, 2009 ASM Wins New ALD Business in Japan at Multiple High-K Logic Gate Manufacturers
• April 28, 2009 Taiwan Foundry Selects ASM International for High-k ALD
• January 6, 2009 ASM International N.V. and SAFC Hitech(TM) Sign Certified Manufacturer and Partnership Agreement
• December 11, 2008 ASM Unveils High-Speed ALD Process that Doubles Throughput for 45 nm High-k Gate Manufacturing
• July 15, 2008 ASM Ships 100th Pulsar® ALD Tool
• May 19, 2008: ASM Simplifies
  High-k and Metal Integration
• December 10, 2007: Volume Production with ALD High-k Process for 45-nm Technology
• November 27, 2007 ASM International and Hitachi Kokusai Sign Licensing Agreement for Atomic Layer Deposition Technology
• July 16, 2007: ASM International Strengthens High-k ALD Market Position

Calendar of Events

• Click here for upcoming tradeshow and conferences